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Low Temperature Equipments and Microscopes

HCL has various cryostats for low-temperature measurements that it shares with the Microelectronics Group, including four Oxford Instrument 3He/4He dilution refrigerators, including one 400-H setup for radiofrequency measurement, one 400-H with an incorporated low temperature CMOS circuit for single shot measurement and a cryo-free Triton system with a 6-1-1 T vector field. We also own several 4He dipping stations and a set of optical cryostats.

Hitachi Cambridge Laboratory

400-H dilution refrigerator with low temperature electronics for single shot readouts. The cryostat is fitted with a 18 T magnet.

Hitachi Cambridge Laboratory

Dilution refigerator equipped for reflectometry measurements with a 18 T magnet.

Hitachi Cambridge Laboratory Hitachi Cambridge Laboratory

Our oldest dilution refrigerator reachs 80 mK and is fitted with a 12 T magnet (left) and our newly delivered Triton cryofree system being fitted with fast lines and low temperature filters.

Hitachi Cambridge Laboratory Hitachi Cambridge Laboratory

One of the two Heliox probes being in service (left). Kerr system measurement with continuous flow (right).

Hitachi Cambridge Laboratory Hitachi Cambridge Laboratory

Optical benches in the optical laboratory.

    Recognizing the importance of microscopy to advanced materials and device research, and to jointly celebrate the 800th anniversary of the University Cambridge, the 20th anniversary of the Hitachi Cambridge Laboratory, and the 100th anniversary of the Hitachi Group, Hitachi Ltd in 2009 presented the University of Cambridge with three electron microscopes from Hitachi High Technologies:

  • Hitachi S-5500 High Resolution Scanning Electron Microscope (HR-SEM)

    This instrument is housed within the shared Microelectronics Research Centre and Hitachi Cambridge Laboratory Building, and managed as part of the Cavendish Microscopy Suite, and has a unique in-lens design which provides resolution of 0.4 nm at 30 kV with a maximum magnification of 2,000,000. The instrument is fully equipped with :

    • Simultaneous bright field and dark field Scanning Transmission Electron Microscopy (STEM) detectors with adjustable collection angle
    • Energy Dispersive X-ray (EDX) spectrometer (Oxford Instruments INCA x-sight)
    • Secondary Electron (SE) and Low Angle Back-Scattered Electron (LA-BSE) detection, through a patented E x B energy filter
    • High Angle (HA-)BSE detector
    • BSE YAG detector

  • Hitachi TM-1000 Table Top SEM

    This compact, easy to use table top instrument operates at 15 kV with a maximum magnification of 10,000 and is equipped with a Swift-ED EDX analysis system. Housed within the Microelectronic Research Centre cleanroom, it proves valuable for observations of devices and structures during their fabrication.

  • Hitachi S-3400N Variable Pressure SEM

    This variable pressure SEM allows observation of damp and organic specimens without any special preparation procedures. The instrument is particularly easy to use through many automated procedures, including automatic alignment. Currently the instrument is housed within the central Cavendish Microscopy Suite.

    These instruments, with the S-5500 in particular, offer a unique and valuable capability to users within the University which in addition allows Hitachi and University researchers to interact to drive the development of next generation microscopy equipment, using micro- and nano-electronic devices, along with microscopy methods and concepts developed by HCL and University of Cambridge researchers.

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